| 微型准分子激光器的软开关电源研究 |
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| 引用本文： | 江超,王又青,李波.微型准分子激光器的软开关电源研究[J].电工技术学报,2005,20(1):77-82. |
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| 作者姓名： | 江超 王又青 李波 |
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| 作者单位： | 华中科技大学激光技术国家重点实验室,武汉,430074;湖北师范学院物理系,黄石,435002;华中科技大学激光技术国家重点实验室,武汉,430074 |
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| 摘 要： | 微型准分子激光器是一种新型的激光器,它在工业紫外激光微加工上有广泛的应用前景.本文研制了该激光器的电源系统,电源采用高频变流技术设计,主回路为串联谐振负载并联输出的方式.为了提高电源的可靠性设计了两开关管的互锁电路及实现激光器的多种工作方式,设计了有效的调制电路.试验结果表明,电源工作在谐振状态,实现了零电流开通、零电压/零电流关断;调制电路能够在谐振状态下对电源输出进行调制,实现了对激光器工作方式的调节,满足了激光器正常工作的要求.
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| 关 键 词： | 微型准分子激光器 高频变换技术 串联谐振开关电源 调制技术 |
| 修稿时间： | 2004年7月14日 |
Study of Micro-Excimer Laser Soft-Switching Power Supply |
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| Jiang Chao,WANG Youqing,Li Bo.Study of Micro-Excimer Laser Soft-Switching Power Supply[J].Transactions of China Electrotechnical Society,2005,20(1):77-82. |
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| Authors: | Jiang Chao WANG Youqing Li Bo |
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| Affiliation: | Huazhong University of Science and Technology Wuhan 430074 China Hubei Normal University Huangshi 435002 China |
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| Abstract: | Micro-excimer laser is a novel laser, and it will be used by industry on the ultraviolet-laser micro-machining. In the paper a laser power supply system is manufactured by high-frequency convertor technology with series-resonant power stage and parallel-load output. In order to improve the reliability of power supply, the mutual-lock circuit of two-switch device is designed. The effective modulation circuit is given in order to realize the many operation-modes of laser. The experimental results of designed power supply indicate that the power supply operating in resonant condition realizes the zero current and zero voltage switching. The circuit can modulate the output of the power supply in resonant state, adjust the operation-modes of laser, and meet the demand of the laser operation. |
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| Keywords: | Micro-excimer laser high-frequency convertor technology series-resonant switch power supply modulation technique |
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