| 大功率MIP中激发温度和电子密度的测定 |
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| 引用本文： | 张占恩. 大功率MIP中激发温度和电子密度的测定[J]. 苏州科技学院学报(工程技术版), 2002, 15(2): 18-24 |
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| 作者姓名： | 张占恩 |
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| 作者单位： | 苏州科技学院环保系,江苏苏州,215011 |
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| 摘 要： | 在假设局部热力学平衡的前提下,分别采用Boltzmann作图法和Saha-Eggert解离平衡计算法测定了大功率微波诱导氮等离子体的激发温度和电子密度。实验结果表明,当选择的元素和光谱线不同、引用的跃迁几率等文献参数不同时,会导致激发温度和电子密度的测定结果显著不同。
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| 关 键 词： | 微波等离子体 发射光谱法 高功率 激发温度 电子密度 |
| 文章编号： | 1004-8022(2002)02-0018-07 |
| 修稿时间： | 2002-02-25 |
Determination of Excitation Temperature and Electron Density in High Power Microwave Induced Plasma |
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| ZHANG Zhan-en. Determination of Excitation Temperature and Electron Density in High Power Microwave Induced Plasma[J]. Journal of University of Science and Technology of Suzhou:Engineering and Technology, 2002, 15(2): 18-24 |
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| Authors: | ZHANG Zhan-en |
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| Abstract: | Measurements of excitation temperature and electron density in high power microwave induced nitrogen plasma were carried out with an assumption of local thermodynamic equilibrium using Boltzmann plot method and Saha-Eggert ionization equilibrium calculation respectively.The experiments showed that the different elements and spectral lines as well as their transition proba-bility data,which were selected for Boltzmann plot and Saha-Eggert calculation,will result in substantial difference in the results of excitation temperature and electron densities. |
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| Keywords: | microwave induced plasma atomic emission spectrometry high power excitation tem-perature electron density |
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