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Flip-chip bonded 0.85-/spl mu/m bottom-emitting vertical-cavity laser array on an AlGaAs substrate
Authors:Y Ohiso K Tateno Y Kohama A Wakatsuki H Tsunetsugu T Kurokawa
Affiliation:NTT Opto-Electron. Labs., Kanagawa, Japan;
Abstract:We report high-performance 0.85-/spl mu/m bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) on an AlGaAs substrate with 2.1 mA threshold current density 4.2 mW maximum output power, 11.7% power conversion efficiency and a maximum operating temperature of 130/spl deg/C. We also demonstrate a flip-chip bonded 0.85-/spl mu/m bottom-emitting VCSEL array, and confirm all pixels across the 8/spl times/8 VCSEL array operate at a f/sub 3/ dB bandwidth of 2.6 GHz at only 4.2 mA.
Keywords:
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