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(Zr,Sn)TiO_4薄膜的制备及电性能研究进展
引用本文:陈飞,周洪庆,朱海奎,韦鹏飞,陈栋,刘敏.(Zr,Sn)TiO_4薄膜的制备及电性能研究进展[J].硅酸盐通报,2009,28(5):986-990.
作者姓名:陈飞  周洪庆  朱海奎  韦鹏飞  陈栋  刘敏
作者单位:南京工业大学材料科学与工程学院,南京,210009
基金项目:江苏省高校中青年学术带头人"青蓝工程"资助项目 
摘    要:从对薄膜材料不断增长的性能要求出发,介绍了(Zr, Sn)TiO_4薄膜的晶体结构特征,主要阐述了其已有的制备工艺及电性能的研究进展.提出(Zr, Sn)TiO_4薄膜的制备方法将得到拓展和改进,指出了其今后的研究方向.

关 键 词:(Zr  Sn)TiO_4薄膜  晶体结构  制备  性能  

Research Progress in Preparation and Electric Properties of (Zr,Sn)TiO_4 Thin Films
CHEN Fei,ZHOU Hong-qing,ZHU Hai-kui,WEI Peng-fei,CHEN Dong,LIU Min.Research Progress in Preparation and Electric Properties of (Zr,Sn)TiO_4 Thin Films[J].Bulletin of the Chinese Ceramic Society,2009,28(5):986-990.
Authors:CHEN Fei  ZHOU Hong-qing  ZHU Hai-kui  WEI Peng-fei  CHEN Dong  LIU Min
Affiliation:CHEN Fei,ZHOU Hong-qing,ZHU Hai-kui,WEI Peng-fei,CHEN Dong,LIU Min(College of Materials Science and Engineering,Nanjing University of Technology,Nanjing 210009,China)
Abstract:From the piont of the increasing requirement on the performance of thin film materials,the crystal structure,preparation technologies,electrical properties of(Zr,Sn)TiO4 thin films were mainly summarized.It was proposed that the preparation methods would be extended and modified.And the reserch focus was also pionted out.
Keywords:(Zr  Sn)TiO4 thin films  crystal structure  preparation  properties  
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