Effects of humidity on nanometer scale wear of a carbon film

Influence of environmental humidity on scanning-scratched wear tests of a carbon film deposited by electron cyclotron resonance plasma sputtering are evaluated in both air and nitrogen with an atomic force microscope and a diamond tip. Wear depth is larger in higher humidity and also larger in air than in nitrogen. Effect of humidity on scratch load dependence and repeated scanning-scratch tests are larger in nitrogen than in air. Effect of humidity on wear is clearer in the repeated scanning-scratch test than in the scratch load dependence test especially in air, and also clearer at larger scratch load. In scratch velocity dependence test, there is a tendency that wear depth decreases with increase in logarithm of scratch velocity both in air and nitrogen. Wear models to explain the experimental results are discussed.