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Perspectives on oblique angle deposition of thin films: From fundamentals to devices |
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| Affiliation: | Instituto de Ciencia de Materiales de Sevilla (CSIC-US), c/ Americo Vespucio 49, 41092 Seville, Spain |
| Abstract: | |
| Keywords: | Oblique angle deposition Glancing angle deposition Magnetron sputtering Electron beam evaporation Nanostructured films Growth modeling Monte Carlo Thin film devices Transparent conductive oxide Energy harvesting Sensors Optical devices Wetting Biomaterials Biosensing GLAD Photovoltaic cells |
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