Resistive switching properties of a thin SiO2 layer with CeOx buffer layer on n+ and p+ Si bottom electrodes

Resistive switching properties of a 2-nm-thick SiO₂ with a CeO_x buffer layer on p⁺ and n⁺ Si bottom electrodes were characterized. The distribution of set voltage (V_set) with the p⁺ Si bottom electrode devices reveals a Gaussian distribution centered in 4.5 V, which reflects a stochastic nature of the breakdown of the thin SiO₂. Capacitance–voltage (C–V) measurements indicate the trapping of electrons by positively shifting the C–V curve by 0.2 V during the first switching cycle. On the other hand, devices with the n⁺ Si bottom electrodes showed a broad distribution in V_set with a mean value higher than that of p⁺ Si bottom electrode devices by 0.9 V. Although no charge trapping was observed with n⁺ Si bottom electrode devices, a degradation in interface states was confirmed, causing a tail in the lower side of the V_set distribution. Based on the above measurements, the difference in the V_set can be understood by the work function difference and the contribution of electron trapping.