Extracting physically interpretable data from electron energy-loss spectra |
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Authors: | C. Witte N.J. Zaluzec L.J. Allen |
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Affiliation: | 1. School of Physics, University of Melbourne, Parkville, Victoria 3010, Australia;2. Electron Microscopy Center, Materials Science Division, Argonne National Laboratory, Argonne, IL 60439, USA |
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Abstract: | Principal component analysis is routinely applied to analyze data sets in electron energy-loss spectroscopy (EELS). We show how physically meaningful spectra can be obtained from the principal components using a knowledge of the scattering of the probe electron and the geometry of the experiment. This approach is illustrated by application to EELS data for the carbon K edge in graphite obtained using a conventional transmission electron microscope. The effect of scattering of the probe electron is accounted for, yielding spectra which are equivalent to experiments using linearly polarized X-rays. The approach is general and can also be applied to EELS in the context of scanning transmission electron microscopy. |
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Keywords: | Electron energy loss spectroscopy (EELS) Principal component analysis Theory of inelastic electron scattering |
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