10-kV diffractive imaging using newly developed electron diffraction microscope |
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Authors: | Osamu Kamimura Takashi Dobashi Kota Kawahara Takashi Abe Kazutoshi Gohara |
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Affiliation: | 1. Central Research Laboratory, Hitachi, Ltd., 1-280, Higashi-Koigakubo Kokubunji-shi, Tokyo 185-8601, Japan;2. Division of Applied Physics, Graduate School of Engineering, Hokkaido University, Sapporo 063-8628, Japan |
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Abstract: | A new electron diffraction microscope based on a conventional scanning electron microscope (SEM), for obtaining atomic-level resolution images without causing serious damage to the specimen, has been developed. This microscope in the relatively low-voltage region makes it possible to observe specimens at suitable resolution and record diffraction patterns. Using the microscope we accomplished 10-kV diffractive imaging with the iterative phase retrieval and reconstructed the structure of a multi-wall carbon nanotube with its finest feature corresponding to 0.34-nm carbon wall spacing. These results demonstrate the possibility of seamless connection between observing specimens by SEM and obtaining their images at high resolution by diffractive imaging. |
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Keywords: | Electron diffraction Diffractive imaging Phase retrieval Scanning electron microscope |
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