Higher-order aberration corrector for an image-forming system in a transmission electron microscope |
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Authors: | H. Sawada T. Sasaki F. Hosokawa S. Yuasa M. Terao M. Kawazoe T. Nakamichi T. Kaneyama Y. Kondo K. Kimoto K. Suenaga |
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Affiliation: | 1. CREST, Japan Science and Technology Agency, 5 Sanbancho, Chiyoda-ku, Tokyo 102-0075, Japan;2. JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan;3. National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan;4. Research Center for Advanced Carbon Materials, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8565, Japan |
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Abstract: | We developed a new electron optical system with three dodecapoles to compensate for spherical aberration and six-fold astigmatism, which generally remains in a two-hexapole type corrector. In this study, we applied the corrector for image-forming system in transmission electron microscope. Compensation for higher-order aberration was demonstrated through a diffractogram tableau using a triple three-fold astigmatism field system, which was then compared with a double hexapole field system. Using this electron optical system, six-fold astigmatism was measured to be less than 0.1 mm at an acceleration voltage of 60 kV, showing that the system successfully compensated for six-fold astigmatism. |
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Keywords: | Six-fold astigmatism Diffractogram tableau Aberration correction |
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