| AlN/SiO_2-B_2O_3-ZnO-Bi_2O_3低温共烧玻璃陶瓷 |
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| 引用本文： | 赵宏生,高廿子.AlN/SiO_2-B_2O_3-ZnO-Bi_2O_3低温共烧玻璃陶瓷[J].电子元件与材料,2008,27(1). |
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| 作者姓名： | 赵宏生 高廿子 |
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| 作者单位： | 清华大学,核能与新能源技术研究院,新材料研究室,北京,102201 |
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| 摘 要： | 制备了SiO2-B2O3-ZnO-Bi2O3系玻璃,并且与AlN液相烧结得到低温共烧玻璃陶瓷。分析了样品的相结构、形貌、介电常数、介质损耗、热导率和热膨胀系数等性能。结果表明:AlN与SiO2-B2O3-ZnO-Bi2O3系玻璃在950℃能够很好地烧结。该陶瓷的性能取决于烧结体的致密度和玻璃含量,当w(玻璃)为40%~60%时,陶瓷具有较低的ε(r3.5~4.8)和tanδ(0.13~0.48)×10–2]、较高的λ5.1~9.3 W/(m.K)]以及与Si相接近的αl(2.6~2.8)×10–6.K–1],适用于低温共烧基板材料。
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| 关 键 词： | 无机非金属材料 低温共烧陶瓷 AlN 硼硅酸盐玻璃 |
AlN/SiO_2-B_2O_3-ZnO-Bi_2O_3 low temperature co-fired glass ceramics |
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| ZHAO Hong-sheng,GAO Nian-zi.AlN/SiO_2-B_2O_3-ZnO-Bi_2O_3 low temperature co-fired glass ceramics[J].Electronic Components & Materials,2008,27(1). |
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| Authors: | ZHAO Hong-sheng GAO Nian-zi |
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| Affiliation: | ZHAO Hong-sheng,GAO Nian-zi(Division of New Materials,Institute of Nuclear , New Energy Technology,Tsinghua University,Beijing 102201,China) |
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| Abstract: | The LTCC SiO2-B2O3-ZnO-Bi2O3 glass-ceramics were produced by liquid phase sintering with AlN powder and were characterized by X-ray diffraction、scanning electron microscopy,etc.The results indicate that AlN and SiO2-B2O3-ZnO-Bi2O3 glass can be sintered well at 950 ℃.The performances of glass ceramics are determined by glass content and compactness.When the glass content is varied from 40% to 60%(mass fraction) the ceramics has εr(3.5~4.8),high λ 5.1~9.3 W/(m.K)] and αl (2.6~2.8)×10–6.k–1] matches with silicon. |
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| Keywords: | non-metallic inorganic material LTCC AlN boron silicate glass |
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