| 化学气相沉积法制备Co-Re涂层沉积设备设计与实验 |
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| 引用本文： | 敬瑀,龚伟,朱黎明,王恩泽. 化学气相沉积法制备Co-Re涂层沉积设备设计与实验[J]. 机械设计与研究, 2019, 35(3): 195-198 |
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| 作者姓名： | 敬瑀 龚伟 朱黎明 王恩泽 |
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| 作者单位： | 西南科技大学材料科学与工程学院,四川绵阳,621000;西南科技大学制造科学与工程学院,四川绵阳,621000 |
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| 基金项目： | 四川省应用基础研究计划;四川省教育厅科研创新团队项目 |
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| 摘 要： | 设计了Co-Re化学气相沉积设备。该设备采用两个升华室,分别以Co(acac)2和Re2(CO)10为前驱体,通过运载气体H2输运至反应室,在速射武器身管钢基体上(0CrNi2MoVA型钢材)同时沉积Co原子和Re原子,生成Co-Re合金抗烧蚀涂层。文章介绍了设备的原理和构成以及设备控制系统的设计方案,并着重介绍了利用道尔顿分压定律设计计算设备的升华室、反应室尺寸。经过初步的测试表明:该设备能够为Co-Re涂层的制备提供合适的温度与气压,并且结构简单、制造成本低,可用于Co-Re合金涂层的制备与研究。
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| 关 键 词： | 化学气相沉积 Co-Re合金涂层 道尔顿分压定律 设备设计 |
Realization of Co-Re Coating Deposition Equipment by Chemical Vapor Deposition |
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| JING Yu,GONG Wei,ZHU Liming,WANG Enze. Realization of Co-Re Coating Deposition Equipment by Chemical Vapor Deposition[J]. Machine Design and Research, 2019, 35(3): 195-198 |
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| Authors: | JING Yu GONG Wei ZHU Liming WANG Enze |
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| Affiliation: | (Shool of Materials Science and Engineering,Southwest University of Science and Technology,Mianyang Sichuan 621010,China;Shool of Manufacturing Science and Engineering,Southwest University of Science and Technology,Mianyang Sichuan 621010,China) |
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| Abstract: | JING Yu;GONG Wei;ZHU Liming;WANG Enze(Shool of Materials Science and Engineering,Southwest University of Science and Technology,Mianyang Sichuan 621010,China;Shool of Manufacturing Science and Engineering,Southwest University of Science and Technology,Mianyang Sichuan 621010,China) |
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| Keywords: | chemical vapor deposition Co-Re alloy coating Dalton’s partial pressure law equipment design |
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