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化合物半导体/SiO2纳米复合薄膜的研究现状
引用本文:马志华,柴跃生,孙钢,张敏刚. 化合物半导体/SiO2纳米复合薄膜的研究现状[J]. 兵器材料科学与工程, 2005, 28(2): 71-74
作者姓名:马志华  柴跃生  孙钢  张敏刚
作者单位:太原科技大学,山西,太原,030024;太原科技大学,山西,太原,030024;上海大学,上海,200072;太原科技大学,山西,太原,030024;中科院,固体物理研究所,安徽,合肥,230031
基金项目:山西省自然科学基金,20041073,
摘    要:半导体/介质镶嵌纳米复合薄膜具备准零维量子点的特征,这类材料具有三阶光学非线性系数大,响应快,功耗低等特点,在光开关、光存储及全光逻辑运算等领域有着广阔的应用前景。对半导体/介质镶嵌纳米复合薄膜的主要制备方法-射频磁控共溅射法的基本原理及技术特点作了概要介绍。从镶嵌于介质中半导体纳米颗粒非线性光学性质的研究动态入手,分类评述了化合物半导体/SiO2纳米复合薄膜近年来的研究状况,指出了这类复合薄膜的研究重点和发展方向。

关 键 词:化合物半导体  镶嵌纳米薄膜  射频磁控溅射  非线性光学性质
文章编号:1004-244X(2005)02-0071-04
修稿时间:2004-08-02

The research status of the compound semiconductor/SiO2 nanocomposite thin films
MA Zhi-hua,CHAI Yue-sheng,SUN Gang,ZHANG Min-gang. The research status of the compound semiconductor/SiO2 nanocomposite thin films[J]. Ordnance Material Science and Engineering, 2005, 28(2): 71-74
Authors:MA Zhi-hua  CHAI Yue-sheng  SUN Gang  ZHANG Min-gang
Abstract:Compound semiconductor/ medium embedded nanocomposite thin films has the characters of quasizero dimensional quantum dots, which the third - order susceptibility is high, response is fast and power consumption is low. They have strong potential applications in optical bistable switches, optical storage and all optical logical operation. The paper summarily introduces the main preparation methods and basic principle and technology of this kind of films: RF magnetron sputtering deposition. In view of the research progress in nonlinear optical of nanometer - sized semiconductor particles embedded in one kind of medium, the paper reviews the research status of compound semiconductor/SiO2 nanocomposite thin films. The research significance and development orientation of the films have also been presented.
Keywords:compound semiconductor  embedded nanocomposite thin films  RF magnetron sputtering deposition  nonlinear optics property
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