Affiliation: | 1. Chair of Functional Materials, Saarland University, P.O. 15 11 50, D‐66041 Saarbrücken (Germany);2. Currently at Georgia Institute of Technology, George W. Woodruff School of Mechanical Engineering, Atlanta, Georgia 30332‐0405 (USA);3. Mechatronics Department, Chair of Micromechanics, Microfluidics/Microactuators, Saarland University, D‐66123 Saarbrücken (Germany) |