| 增量位移集成光电传感器设计 |
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| 引用本文： | 刘阳,吴宏圣,杨帆,许家林. 增量位移集成光电传感器设计[J]. 电子测量与仪器学报, 2013, 0(10): 992-997 |
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| 作者姓名： | 刘阳 吴宏圣 杨帆 许家林 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,长春130033 |
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| 基金项目： | 国家科技重大专项（2013ZX04007021）;吉林省光电子产业孵化专项资金项目（FH0022） |
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| 摘 要： | 为了提高处理增量位移信息的集成光电传感器输出信号的有效精度,降低输出阻抗,以保证光电传感器的性能.基于0.35 μm CMOS工艺,采用Cadence设计了1款用于处理增量位移信号的光电传感器,并对关键参数进行了理论推导以及验证.实验结果表明,该光电传感器输出信号有效精度优于10 bit,输出阻抗低于5 Ω,各项性能指标均符合行业标准,并且能够稳定地运行.
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| 关 键 词： | 增量位移 光电传感器 有效精度 输出阻抗 |
Design of the incremental displacement integrated photoelectricity sensor |
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| Liu Yang Wu Hongsheng Yang Fan Xu Jialin. Design of the incremental displacement integrated photoelectricity sensor[J]. Journal of Electronic Measurement and Instrument, 2013, 0(10): 992-997 |
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| Authors: | Liu Yang Wu Hongsheng Yang Fan Xu Jialin |
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| Affiliation: | Liu Yang Wu Hongsheng Yang Fan Xu Jialin ( Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China) |
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| Abstract: | In order to improve the output signal effective precision of the integrated photoelectric sensor that proces- ses the incremental displacement information, reducing output impedance, and ensuring the performance of photoe- lectric sensor. A photoelectric sensor for processing incremental displacement signal based on 0.35μm CMOS tech- nology with Cadence is designed, and the key parameters are analyzed theoretically. The experimental results show that the photoelectric sensor output signal effective precision is more than 10 bit, the output impedance is less than 5 Ω, the performance meet industry standards and can run stably. |
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| Keywords: | incremental displacement photoelectric sensor effective precision output impedance |
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