| 柔性膜微型电磁驱动器的设计与制作工艺 |
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| 引用本文： | 苏宇锋,陈文元,陈晓梅,张卫平,王伟.柔性膜微型电磁驱动器的设计与制作工艺[J].仪表技术与传感器,2005(12):10-12. |
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| 作者姓名： | 苏宇锋 陈文元 陈晓梅 张卫平 王伟 |
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| 作者单位： | 1. 上海交通大学微米纳米技术研究院薄膜与微细技术教育部重点实验室,上海,200030
2. 中船集团公司726研究所,上海,200025 |
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| 基金项目： | 教育部博士点基金（20010248001） |
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| 摘 要： | 主要讨论了一种微型电磁驱动器的设计和制作工艺。该驱动器结构简单，由Parylene振动膜和硅基片两层组成，将驱动线圈与硅片集成在一起。对平面电磁线圈的驱动特性和驱动器振动膜的形变进行了分析，并对其关键尺寸进行优化。采用电镀工艺在硅基片上电镀驱动线圈，在Parylene薄膜上电镀NiFe合金阵列，采用牺牲层工艺得到振动膜的悬空结构。
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| 关 键 词： | Parylene 制作工艺 柔性膜微型电磁驱动器 NiFe合金阵列 |
| 文章编号： | 1002-1841（2005）12-0010-03 |
| 收稿时间： | 2004-08-30 |
| 修稿时间： | 2005-09-24 |
Design and Fabrication of Micro Electromagnetic Actuator Based on Parylene Diaphragm |
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| SU Yu-feng,CHEN Wen-yuan,CHEN Xiao-mei,ZHANG Wei-ping,WANG Wei.Design and Fabrication of Micro Electromagnetic Actuator Based on Parylene Diaphragm[J].Instrument Technique and Sensor,2005(12):10-12. |
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| Authors: | SU Yu-feng CHEN Wen-yuan CHEN Xiao-mei ZHANG Wei-ping WANG Wei |
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| Affiliation: | 1. Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China; 2.726th Institute, China State Ship Building Corporation, Shanghai 200025, China |
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| Abstract: | Presented the design and fabrication of a micro electromagnetic actuator, which composed of two layers. One layer is a Parylene diaphragm with an electroplated NiFe array, the other layer is a silicon wafer with a coil on it. Analyzed the actuating character of the coil and the Parylene diaphragm, and optimize the dimension of NiFe posts. Electroplating was adopted to fabricate the coil on the silicon and the NiFe array on the Parylene diaphragm, and sacrificial layer technology was employed to release the diaphragm from the silicon wafer. |
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| Keywords: | Electro-magnetically Actuated Micro Actuator Parylene |
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