| 激光能量对Si等离子体电子温度的影响 |
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| 引用本文： | 刘丽炜,张喜和,张凤东,谭勇,陈长波. 激光能量对Si等离子体电子温度的影响[J]. 长春理工大学学报(自然科学版), 2008, 31(4) |
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| 作者姓名： | 刘丽炜 张喜和 张凤东 谭勇 陈长波 |
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| 作者单位： | 长春理工大学,理学院,长春,130022;长春理工大学,理学院,长春,130022;长春理工大学,理学院,长春,130022;长春理工大学,理学院,长春,130022;长春理工大学,理学院,长春,130022 |
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| 基金项目： | 国防科工委预研项目 |
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| 摘 要： | 建立一套激光等离子体光谱测量实验装置,以Nd:YAG调Q倍频固体激光器为激发光源,硅作为样品.通过改变激光输出能量,获得Si样品的等离子体谱图,对Si的等离子体谱图进行分析,根据玻尔兹曼分布,计算出Si的等离子体电子温度,并分析Si的等离子体电子温度随激光能量改变的变化趋势.
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| 关 键 词： | 激光等离子体 电子温度 光谱 |
Influence of Laser Energy on the Electron Temperature of the Si Plasma |
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| LIU Liwei,ZHANG Xihe,ZHANG Fengdong,TAN Yong,CHEN Changbo. Influence of Laser Energy on the Electron Temperature of the Si Plasma[J]. Journal of Changchun University of Science and Technology, 2008, 31(4) |
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| Authors: | LIU Liwei ZHANG Xihe ZHANG Fengdong TAN Yong CHEN Changbo |
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| Affiliation: | LIU Liwei,ZHANG Xihe,ZHANG Fengdong,TAN Yong,CHEN Changbo(Changchun University of Science , Technology,Changchun 130022) |
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| Abstract: | A set of laser plasma spectra measurement setup was build up,we select Nd:YAG double-frequency solid state laser as pumping laser and silicon as sample.Through modulating the energy of laser we obtain plasma spectrum of silicon sample,analysis the plasma spectrum of silicon,according to boltzmann distribution,calculating of the electron tempera-ture of the silicon plasma,and analysis the varying tendency of the electron temperature of the silicon plasma following the varying of laser energy. |
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| Keywords: | laser plasma electron temperature spectram |
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