Floating-patch MEMS antennas on HRS substrate for millimetre-wave applications |
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| Authors: | Cho YH Ha M-L Choi W Pyo C Kwon Y-S |
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| Affiliation: | Sch. of Inf. & Commun. Eng., Mokwon Univ., Daejeon, South Korea; |
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| Abstract: | Novel floating-patch micro-electro-mechanical system (MEMS) antennas are proposed for millimetre-wave applications. The floating-patch MEMS antennas are fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented. |
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