Affiliation: | 1.MEMS Research Center, Department of Electronics and Communication Engineering, Koneru Lakshmaiah Education Foundation (Deemed to be University), Vaddeswaram, Guntur, 522502, India ;2.Department of Electronics and Communication Engineering, VNR Vignana Jyothi Institute of Engineering and Technology, Bachupally, Hyderabad, 500090, India ;3.National MEMS Design, Department of Electronics and Communication Engineering, National Institute of Technology, Silchar, Assam, 788010, India ; |