| TiN/TiSiN复合涂层显微结构与力学性能研究 |
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| 引用本文： | 宿福利,高见,李洪林,李祝,宋之敏.TiN/TiSiN复合涂层显微结构与力学性能研究[J].工具技术,2011(12):39-43. |
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| 作者姓名： | 宿福利 高见 李洪林 李祝 宋之敏 |
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| 作者单位： | [1]四川大学 [2]成都工具研究所有限公司 |
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| 摘 要： | 采用工业用直流脉冲等离子体增强化学气相沉积(PCVD)法在硬质合金刀具基体上制备了TiN和TiN/TiSiN复合涂层.对TiN涂层和不同沉积温度下制备的三种TiN/TiSiN复合涂层的微观结构和力学性能进行了对比研究.结果表明:随着沉积温度的升高,TiN/TiSiN复合涂层的结合力增大；沉积温度为550℃时,TiN/T...
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| 关 键 词： | TiN/TiSiN复合涂层 微观结构 力学性能 |
Study on Microstructures and Mechanical Properties of TiN/TiSiN Multilayer Coatings |
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| Su Fuli,Gao Jian,Li Honglin,Li Zhu,Song Zhimin.Study on Microstructures and Mechanical Properties of TiN/TiSiN Multilayer Coatings[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2011(12):39-43. |
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| Authors: | Su Fuli Gao Jian Li Honglin Li Zhu Song Zhimin |
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| Affiliation: | Su Fuli, Gao Jian, Li Honglin, Li Zhu, Song Zhimin |
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| Abstract: | The TiN and TiN/TiSiN multilayer coatings were deposited on substrates of WC - Co cutting tools by using indus- trial pulsed d. c. plasma chemical vapor deposition （PCVD） method. The microstructures and mechanical properties of the coatings were investigated. The results show that the adherence of TiN/TiSiN multilayer coatings increased with the depositing temperature increasing. When the temperature is 550℃, the microhardness and the wear property of TiN/TiSiN muhilayer coatings were better than that of TiN/TiSiN multilayer coatings deposited under 500% and 600℃. The microhardness and the wear property of TiN/ TiSiN muhilayer coatings are better than that of single TiN coating. |
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| Keywords: | TiN/TiSiN multilayer coatings microstructure mechanical property |
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