| TiN—TiN／CrN—CrN薄膜的制备及应用研究 |
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| 引用本文： | 王辉,梁红樱,张欣苑,赵海波,文季秋.TiN—TiN／CrN—CrN薄膜的制备及应用研究[J].工具技术,2009,43(10):14-18. |
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| 作者姓名： | 王辉 梁红樱 张欣苑 赵海波 文季秋 |
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| 作者单位： | 1. 四川大学分析测试中心,610065,成都市
2. 四川大学 |
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| 摘 要： | 通过采用辅助增强磁控溅射方法，研究了在硬质合金刀片上制备TiN—TiN／CrN—CrN薄膜的工艺方法。利用SEM、XRD等方法分析了Cr靶溅射电流、N2气量的变化对TiN—TiN／CrN—CrN膜的表面形貌及结构和织构影响，采用断续切削试验方法研究了TiN—TiN／CrN—CrN涂层刀片的耐磨性及抗剥落性，得出了一种TiN—TiN／CrN—CrN薄膜工业化制备方法。
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| 关 键 词： | 辅助增强磁控溅射 CrN薄膜 制备 方法 |
Fabrication Process and Application of TiN-TiN/CrN-CrN Films |
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| Wang Hui,Liang Hongying,Zhang Xinyuan,Zhao Haibo,Wen Jiqiu.Fabrication Process and Application of TiN-TiN/CrN-CrN Films[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2009,43(10):14-18. |
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| Authors: | Wang Hui Liang Hongying Zhang Xinyuan Zhao Haibo Wen Jiqiu |
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| Affiliation: | Wang Hui,Liang Hongying,Zhang Xinyuan,Zhao Haibo,Wen Jiqiu |
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| Abstract: | In the present paper,we studied the process for fabrication of TiN-TiN/CrN-CrN films on hard alloyed blade through an enhanced magnetic sputtering method.We studied effects of the sputtering current of Cr target and the variation of N2 flow on the surface morphologies,structure and texture by scanning electron microscope(SEM) and powder X-ray diffraction(XRD).We also studied the abrasion performance and anti-stripping of TiN-TiN/CrN-CrN films with intermittent cutting method,then we found an industrial fabr... |
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| Keywords: | plasma enhanced magnetic sputtering CrN films fabrication method |
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