晶圆级倒装装备中伺服直驱轴的振动抑制

晶圆级倒装装备中伺服直驱轴由于机械振动因素的存在,导致伺服系统的带宽难以满足设备中伺服直驱轴高加速度与高精度的使用情况。为了抑制振动、提高伺服系统的带宽,设计一款陷波滤波器并将其应用在晶圆级倒装装备的伺服控制系统中,通过实验,证明经过滤波器处理之后的伺服直驱轴的带宽大大提高,并且其稳态误差在微米量级时其整定时间也能低至毫秒级别。

Vibration Suppression of Servo Direct Drive Shaft in Wafer Level Flip-chip Equipment

Due to the existence of mechanical vibration factors in the servo-drive shaft of wafer-level flip-chip equipment, the bandwidth of the servo system is difficult to meet the high acceleration and high precision use of the servo direct drive shaft in the equipment.In order to suppress the vibration and increase the bandwidth of the servo system, a notch filter was designed and applied to the servo control system of wafer level flip-chip equipment.Through experiments, it is proved that the bandwidth of the servo direct drive shaft after the filter processing is greatly improved and the settling time can be as low as the millisecond level when the steady state error is on the order of micrometers.