| 超白玻璃微型阵列孔在电化学放电加工中的气膜稳定性研究 |
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| 引用本文： | 黄亮,曹岩,雷艳,田甜.超白玻璃微型阵列孔在电化学放电加工中的气膜稳定性研究[J].机床与液压,2020,48(14):6-12. |
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| 作者姓名： | 黄亮 曹岩 雷艳 田甜 |
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| 作者单位： | 西安工业大学机电工程学院,陕西西安710021;西安昆仑工业集团有限责任公司工具结构制造公司,陕西西安710043 |
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| 基金项目： | 国家自然科学基金青年科学基金项目（51705392）；陕西省教育厅重点实验室项目（2017JS058）；2017年陕西省特种加工重点实验室项目（2017SXTZKFJG04） |
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| 摘 要： | 近年来,随着超白玻璃等非导电硬质材料在微机电系统结构件中的广泛应用,给具有这种材料的异形结构产品加工带来了诸多困难。通过分析超白玻璃在电化学放电加工过程中的极间气膜产生原理,研究不同电源参数组合下的气膜击穿特性,并通过进一步分析气膜稳定性条件下不同工艺参数组合作用的成形质量与材料去除率间的关系,成功实现了超白玻璃微型阵列孔的最优工艺参数选择及加工。
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| 关 键 词： | 电化学放电加工 超白玻璃微型阵列孔 气膜 |
Study on the Stability of Gas Film in Electrochemical Discharge Machining of Ultra-white Glass Micro Array Holes |
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| HUANG Liang,CAO Yan,LEI Yan,TIAN Tian.Study on the Stability of Gas Film in Electrochemical Discharge Machining of Ultra-white Glass Micro Array Holes[J].Machine Tool & Hydraulics,2020,48(14):6-12. |
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| Authors: | HUANG Liang CAO Yan LEI Yan TIAN Tian |
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| Affiliation: | (School of Mechatronic Engineering,Xi’an Technological University,Xi’an Shaanxi 710021,China;Tool Structure Manufacturing Company,Xi’an Kunlun Industry(Group)Co.,Ltd.,Xi’an Shaanxi 710043,China) |
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| Abstract: | With the widespread application of non-conducting tough materials, such as ultra white glass in MEMS recent years, many difficulties have arisen in the processing of these kind of material with eigen-structure characteristics. By analyzing the generation principle of interelectrode gas film of this kind of material, the breakdown characteristics of gas film under different power supply parameters were studied, and the relationship between the process parameters and the forming quality, material removal rate under the condition of gas film stability was further analyzed, so as to realize the optimal selection and successful machine of the ultra white glass micro array holes. |
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| Keywords: | Electrochemical discharge machining Ultra white glass micro array holes Gas film |
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