| 化学技术在微机械传感器发展中的应用 |
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| 引用本文： | 郑丹,李昕欣.化学技术在微机械传感器发展中的应用[J].半导体技术,2001,26(5):4-7. |
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| 作者姓名： | 郑丹 李昕欣 |
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| 作者单位： | 中国科学院上海冶金研究所 |
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| 摘 要： | 微机械传感器除运用在微电子制造技术外，大量应用化学腐蚀，特种高分子落膜材料，电镀和电化学工艺等化学领域的技术，形成了很多独特的微机械加工技术，这些技术的运用解决了很多关键性技术问题，极大地推进了微机械传器技术的发展，本文从体微机械加工，表面微机械加工和LIGA技术三方面论述化学在近来新型传感器发展中的技术突破和成果。
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| 关 键 词： | 化学技术 微机械技术 传感器技术 |
| 文章编号： | 1003-353(2001)05-0004-04 |
Applications of chemical technologies in development of micro-machined transducers |
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| ZHENG Dan,LI Xin-xin.Applications of chemical technologies in development of micro-machined transducers[J].Semiconductor Technology,2001,26(5):4-7. |
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| Authors: | ZHENG Dan LI Xin-xin |
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| Abstract: | Besides silicon-based microelectronic technologies, development of micro-machined transducer employs various novel chemical technologies, such as etching, polymer film formation, electroplating process and so on. Using the chemical techniques has successfully solved many key technical issues, thereby enhancing the fabrication capability of micro-machined technologies. On three aspects of micro-machining technologies, buck micro-machining, surface micro-machining and LIGA micro-machining, the paper relates the recent achievements and technical breakthrough of micro sensors and actuators by using novel chemical technologies. |
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| Keywords: | Chemical technology Micro-machining technology Transducer technology |
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