新型惯性式压电驱动机构的研究

基于控制移动机构和支撑面之间摩擦力的方法,提出了新型惯性冲击式压电陶瓷驱动机构的研究方案.分析了驱动机构的工作原理,驱动电压与驱动力、位移之间的关系,设计、制做了可实现直线往复运动的压电微型驱动器结构,并作了相关的性能测试.实验结果表明,采用简单的对称信号波形能驱动机构运动.直线驱动器最高速度可达1 mm/s,最大步长分辨率为20 nm,最大承载能力为1 000g.

Research on novel inertial piezoelectric actuator

Based on controlling the orderly changes of the PZT moving mechanism and friction between supporting faces in mechanical way, a kind of inertial piezoelectric actuator was proposed. The relationship between the driving voltage and the driving force and the distance were analyzed, the structure of a new inertial piezoelectric actuator that can realize single dimension reciprocating motion was designed and manufactured. The experimental results show that the simple associated symmetry electrical signal can provide stable stepping movement with the speed of 1 mm/s, high resolution of 20 nm and maximum loading capacity of 1 000 g, it is expected that the proposed actuator will be widely applied to precision industry.