| 多元HgCdTe线列探测器的同步辐射形貌术分析 |
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| 引用本文： | 蔡毅 郑国珍. 多元HgCdTe线列探测器的同步辐射形貌术分析[J]. 红外与毫米波学报, 1994, 13(5): 385-390 |
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| 作者姓名： | 蔡毅 郑国珍 |
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| 作者单位： | 中国科学院上海技术物理研究所红外物理国家重点实验室，中国科学院上海技术物理研究所红外物理国家重点实验室，中国科学院上海技术物理研究所红外物理国家重点实验室，昆明物理研究所，中国科学院高能物理研究所北京正负电子对撞机国家实验室 上海200083 昆明物理研究所，云南，昆明650223，上海200083，上海200083，云南 昆明650223，北京100039 |
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| 基金项目： | 中国科学院北京正负电子对撞机国家实验室资助项目 |
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| 摘 要： | 利用同步辐射拍摄了长波光导多元HgCdTe探测器芯片的高分辨率的白光形貌相,观察到多元线列器件探测元中明显存在晶格应变区、亚晶界、滑移面等缺陷.实验结果表明:多元线列器件探测元的性能与其光敏区HgCdTe材料中的晶体缺陷密切相关,器件工艺对HgCdTe晶片的应力状态有极大的影响,器件工艺对材料的应力作用可从多元器件探测元晶格的完整性反映出来.
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| 关 键 词： | 多元线列探测 同步辐射 形貌术 HgCdTe |
SYNCHROTRON RADIATION TOPOGRAPHY ANALYSIS OF MULTI-ELEMENT HgCdTe DETECTOR LINEAR ARRAYS |
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| Cai Yi, Zheng Guozhen Zhu Xichen Jiang Jianhua Tang Dingyuan. SYNCHROTRON RADIATION TOPOGRAPHY ANALYSIS OF MULTI-ELEMENT HgCdTe DETECTOR LINEAR ARRAYS[J]. Journal of Infrared and Millimeter Waves, 1994, 13(5): 385-390 |
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| Authors: | Cai Yi Zheng Guozhen Zhu Xichen Jiang Jianhua Tang Dingyuan |
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| Abstract: | High-resolution topographs of long-wave multi-element HgCdTe PC detector arrays were taken with synchrotron radiation white-beam topography. A number of crystal defects were revealed in the detecting elements of the multi-element detector arrays, such as lattice distortion zones, subgrain boundaries and slip planes. The experimental results show that there is a correlation between the performances of multi-element detector arrays and the defects in their active areas; that the stress state of HgCdTe device chips is greatly affected by device technologies; and that the lattice perfection of the detecting elements of multi-element detector arrays reflects the effect of device technologies on the stress state of HgCdTe device chips. |
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| Keywords: | HgCdTe multi-element detector arrays crystal defects synchrotron radiation topography. |
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