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Heterogeneous InSb quantum well transistors on silicon for ultra-high speed, low power logic applications
Authors:Ashley   T. Buckle   L. Datta   S. Emeny   M.T. Hayes   D.G. Hilton   K.P. Jefferies   R. Martin   T. Phillips   T.J. Wallis   D.J. Wilding   P.J. Chau   R.
Affiliation:QinetiQ, Malvern;
Abstract:The heterogeneous integration of InSb quantum well transistors onto silicon substrates is investigated for the first time. 85 nm gate length FETs with fT = 305 GHz at Vds = 0.5 V and DC performance suitable for digital logic are demonstrated on material with a buffer just 1.8 mum thick. An initial step towards integrating InSb FETs with mainstream Si CMOS for high-speed energy-efficient logic applications has been achieved.
Keywords:
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