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双振镜激光扫描的误差分析及校正方法
引用本文:韩万鹏,蒙文,李云霞,李大为,周嘉.双振镜激光扫描的误差分析及校正方法[J].光电技术应用,2011,26(4):14-18.
作者姓名:韩万鹏  蒙文  李云霞  李大为  周嘉
作者单位:1. 空军工程大学,陕西西安,710077
2. 西安通信学院,陕西西安,710106
摘    要:近年来,二维振镜激光扫描技术因其速度快、精度高、易于控制等特点,得到了越来越广泛的应用.但振镜扫描系统在扫描过程中,存在着固有扫描场的几何畸变,系统本身也存在着线性、非线性误差以及其他误差等,严重影响了振镜扫描系统在不同应用领域的扫描质量。从理论推导出发,较为详细地分析了物镜前扫描和物镜后扫描两种方式存在的几何畸变以及...

关 键 词:双振镜  几何畸变  误差分析  展望

Error Analysis and Correction Methods of Dual Galvanometer Scanning
HAN Wan-peng,MENG Wen,LI Yun-xia,LI Da-wei,ZHOU Jia.Error Analysis and Correction Methods of Dual Galvanometer Scanning[J].Electro-Optic Technology Application,2011,26(4):14-18.
Authors:HAN Wan-peng  MENG Wen  LI Yun-xia  LI Da-wei  ZHOU Jia
Affiliation:HAN Wan-peng1,MENG Wen1,LI Yun-xia1,LI Da-wei1,ZHOU Jia2 (1.Air Force Engineering University,Xi'an 710077,China,2.Xi'an Communication Institute,Xi'an 710106,China)
Abstract:The two-dimensional laser galvanometer technology is widely used for the characters of high speed,high precision and good controllability.Due to the intrinsic geometric distortion on the scanning field,and linear,nonlinear and other errors of the system,the scanning quality of the laser galvanometer system is seriously affected in different application fields.The geometric distortion and various errors are profoundly analyzed about the pre-object and post-object scanning models,and the pertinence compensati...
Keywords:dual galvanometer  geometric distortion  error analysis  prospect  
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