| 磁控溅射沉积V-Al-N涂层的结构和性能研究 |
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| 引用本文： | 朱萍,葛芳芳,李胜祗,黄峰.磁控溅射沉积V-Al-N涂层的结构和性能研究[J].表面技术,2012,41(4):46-48. |
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| 作者姓名： | 朱萍 葛芳芳 李胜祗 黄峰 |
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| 作者单位： | 安徽工业大学,马鞍山243002;中国科学院宁波材料技术与工程研究所,宁波315201;中国科学院宁波材料技术与工程研究所,宁波,315201;安徽工业大学,马鞍山,243002 |
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| 摘 要： | 通过反应磁控溅射法制备了V1-xAlxN(0≤x≤0.67)涂层,研究了Al含量对涂层微观结构、力学性能及摩擦磨损性能的影响.结果表明:在0≤x≤0.51范围内,随Al含量的增加,V1-xAlxN涂层的微观结构不断变得致密,硬度不断提高,其中结构最为致密的V0.49Al0.51N涂层的硬度较VN提高了近3倍;在较宽的成分区间内,V1-xAlxN涂层结构均比较致密,硬度大于30 GPa,最高硬度达到41 GPa;随着硬度的改善,V1-xAlxN涂层的摩擦磨损性能较VN涂层也有不同程度的提高.
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| 关 键 词： | 反应磁控溅射 V-Al-N涂层 微结构 摩擦磨损 |
| 收稿时间： | 2012/4/12 0:00:00 |
| 修稿时间： | 2012/8/20 0:00:00 |
Structure and Properties of Magnetron Sputtered V-Al-N Coatings |
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| ZHU Ping,GE Fang-fang,LI Sheng-zhi and HUANG Feng.Structure and Properties of Magnetron Sputtered V-Al-N Coatings[J].Surface Technology,2012,41(4):46-48. |
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| Authors: | ZHU Ping GE Fang-fang LI Sheng-zhi and HUANG Feng |
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| Affiliation: | 1.Anhui University of Technology,Maanshan 243002,China;2.Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Science,Ningbo 315201,China) |
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| Abstract: | V1-xAlxN(0≤x≤0.67) coatings were prepared by reactive magnetron co-sputtering.The effect of Al content on the phase,microstructure,mechanical properties and tribological behavior was studied.The result show that while a columnar structure is maitained in the V1-xAlxN(0≤x≤0.51) coatings,they are progressively densified with AlN addition.Simultaneously,the hardness is nearly quadrupled for the V0.49Al0.51N coating showing a very dense,non-columnar microstructure as compared with VN;Hard(>30 GPa) coatings can be found over a moderate range of composition and the microstructures,and the highest value is 41 GPa;Concomitant with the hardness improvement,the V1-xAlxN coatings exhibites superior wear resistance to that of the VN coating. |
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| Keywords: | reactive magnetron sputtering V-Al-N coating microstructure friction and wear |
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