Effect of the duration of electrochemical anodization on the microhardness of macroporous silicon |
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Authors: | A. A. Dmitrievskiy N. Yu. Efremova A. V. Druzhkin T. O. Korostelyova D. G. Guseva |
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Affiliation: | 1. Tambov State University named after G.R. Derzhavin, Tambov, 392000, Russia
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Abstract: | The dependence of the microhardness H of macroporous silicon layers formed on the duration t an of electrochemical anodization at a constant current density of J = 20 mA/cm2 is studied. It is shown that the nonlinear run of the dependence H(t an) is due to the influence exerted on the microhardness not only by the surface density of pores, but also by the single-crystal base at L < 10h, where L and h are the thickness of the porous layer and the depth of indenter penetration, respectively. |
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