环形波动陀螺结构设计与仿真

基于 MEMS 技术,提出了一种环形波动陀螺结构并建立了谐振子的有限元模型。利用 ANSYS软件对谐振子进行了模态分析,确定了各阶振型和固有频率。通过分析谐振子结构参数对振型和频率的影响,得到了谐振子的优化设计参数,优化后其工作频率与其他振型频率的差大于1 kHz,有效避免工作模态与其他模态间的频率耦合。经仿真验证,设计的环形结构的性能参数满足要求,具有明显的优越性。

Structure design and simulation of MEMS vibrating ring gyroscope

MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1 kHz after optimization,which can avoid the fre-quency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the per-formance parameters of the ring structure meet the design requirements and have obvious advantages.