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铀表面脉冲辉光等离子氮化初步研究
引用本文:王小红,陈林,龙重,钟永强.铀表面脉冲辉光等离子氮化初步研究[J].真空,2012,49(4):40-43.
作者姓名:王小红  陈林  龙重  钟永强
作者单位:中国工程物理研究院,四川绵阳,621900
基金项目:中国工程物理研究院基金资助项目
摘    要:采用脉冲辉光等离子体离子氮化技术对贫铀表面进行了氮化处理,采用俄歇电子能谱(AES)对氮化层进行元素深度剖析,采用X射线衍射(XRD)、扫描电子显微镜(SEM)对氮化层组织结构进行了分析表征。结果表明:脉冲偏压-900 V,工作氮分压50 Pa、100 Pa,氮化时间2.5 h~4 h下在贫铀表面能获得约20μm厚的氮化层,氮化层为U2N3的单一立方结构且均匀致密,脉冲辉光等离子氮化技术能在贫铀表面实现氮化。

关 键 词:  脉冲辉光等离子体  离子氮化  U2N3

Feasibility of pulse glow plasma nitriding on uranium surface
WANG Xiao-hong , CHEN Lin , LONG Zhong , ZHONG Yong-qiang.Feasibility of pulse glow plasma nitriding on uranium surface[J].Vacuum,2012,49(4):40-43.
Authors:WANG Xiao-hong  CHEN Lin  LONG Zhong  ZHONG Yong-qiang
Affiliation:(China Academy of Engineering Physics,Mianyang 621900,China)
Abstract:Passive layers of uranium nitride were formed by pulse glow plasma nitriding on depleted uranium surface.Microstructure and composition of the passive layer were investigated by X-ray diffraction and scanning electron microscope(SEM).Distribution of U,N,O elements on the interface between passive layer and substrate was studied by Auger electron spectrum(AES).As a result,the passive layer formed by-900V pulse bias,50 Pa and 100Pa nitrogen partial pressure and nitriding 2.5h ~4h is with about 20μm thickness,and composition of the layer is single U2N3 of cubic structure which is uniform and compact.Pulse glow plasma nitriding on depleted uranium surface is feasible.
Keywords:uranium  pulse glow plasma  ion nitriding  U2N3
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