| CVD金刚石膜中黑色缺陷的存在形式 |
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| 引用本文： | 安晓明,郭辉,孙振路,姜龙,吴晓波. CVD金刚石膜中黑色缺陷的存在形式[J]. 真空, 2012, 49(4): 47-50 |
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| 作者姓名： | 安晓明 郭辉 孙振路 姜龙 吴晓波 |
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| 作者单位： | 1. 河北省激光研究所,河北石家庄,050081
2. 河北普莱斯曼金刚石科技有限公司,河北石家庄,050081 |
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| 基金项目： | 河北省科技支撑项目基金 |
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| 摘 要： | 采用光学显微镜在透射光、反射光和侧光模式下研究了多晶CVD金刚石厚膜中黑色缺陷的存在形式,利用X射线光电子能谱、拉曼光谱研究了黑色缺陷的组成成分。结果表明:晶界处的裂隙或者孔洞和晶粒内部的结晶缺陷是金刚石膜内部黑色缺陷的存在形式之一。
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| 关 键 词： | 金刚石薄膜 黑色缺陷 光学显微镜 |
Existence form of black defects in CVD diamond film |
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| AN Xiao-ming , GUO Hui , SUN Zhen-lu , JIANG Long , WU Xiao-bo. Existence form of black defects in CVD diamond film[J]. Vacuum(China), 2012, 49(4): 47-50 |
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| Authors: | AN Xiao-ming GUO Hui SUN Zhen-lu JIANG Long WU Xiao-bo |
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| Affiliation: | (Hebei Institute of Laser,Shijiazhuang 050081,China;Hebei Plasma Diamond Technology Co.,LTD,Shijiazhuang 050081,China) |
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| Abstract: | The existence form of black defects in diamond flim were investigated by optical microscope in transmitted light,reflected light and side light mode.X-ray photoelectronic spectroscopy and Raman spectroscopy were used to analyze the composition of the black defects.The results show that the source of black defects are the fracture or holes in grain boundary and crystal defects. |
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| Keywords: | diamond film black defect optical microscope |
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