| A Study of AlN Films Prepared by Arc Ion Plating |
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| 引用本文： | MeidongHUANG ChunyanLU等. A Study of AlN Films Prepared by Arc Ion Plating[J]. 材料科学技术学报, 2003, 19(1): 27-29 |
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| 作者姓名： | MeidongHUANG ChunyanLU等 |
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| 作者单位： | InstituteofMetalResearchChineseAcademyofScience,Shenyang110016,China |
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| 摘 要： | Hexagonal AlN films have been obtained by arc ion plating at different negative biases ,X-ray diffraction and scanning electron microscopy results show that AlN films with smooth surfaces and (002) preferred orientation are obtained at low biases ,whereas those with coarse surfaces and (100) preferred orientation are obtained at high biases,The formation mechanism of AlN is analyzed and the experiment results are discussed,The effect of bias on adhesion strength has also been examined.
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| 关 键 词： | 电弧离子镀膜 氮化铝膜 AlN AIP 半导体器件 |
A Study of AlN Films Prepared by Arc Ion Plating |
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| Meidong HUANG,Chunyan LU,Bing WANG,Chao SUN,Rongfang HUANG,Lishi WEN,Guoqiang LIN,Chuang DONG. A Study of AlN Films Prepared by Arc Ion Plating[J]. Journal of Materials Science & Technology, 2003, 19(1): 27-29 |
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| Authors: | Meidong HUANG Chunyan LU Bing WANG Chao SUN Rongfang HUANG Lishi WEN Guoqiang LIN Chuang DONG |
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| Affiliation: | Institute of Metal Research, Chinese Academy of Science, Shenyang 110016, China... |
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| Abstract: | Hexagonal AIN films have been obtained by arc ion plating at different negative biases. X-ray diffraction and scanningelectron microscopy results show that AIN films with smooth surfaces and (002) preferred orientation are obtainedat low biases, whereas those with coarse surfaces and (100) preferred orientation are obtained at high biases. Theformation mechanism of AIN is analyzed and the experiment results are discussed. The effect of bias on adhesionstrength has also been examined. |
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| Keywords: | A1N AIP Preferential orientation Bias |
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