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Excimer laser processing of inkjet-printed and sputter-deposited transparent conducting SnO2:Sb for flexible electronics |
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| Authors: | Wayne M. Cranton Sharron L. Wilson Demosthenes C. Koutsogeorgis Richard Hedgley Stephen Lipiec |
| Affiliation: | a School of Computing and Informatics, Nottingham Trent University, Nottingham, NG11 8NS, UK b Patterning Technologies Ltd., 58 Shrivenham Hundred Business Park, Watchfield, Oxon, SN6 8TY, UK c Keeling & Walker Limited, Whieldon Road, Stoke-on-Trent, Staffordshire, ST4 4JA, UK d MDSL 7 Chapel Drive, Little Waltham, Chelmsford, Essex, CM3 3LW, UK |
| Abstract: | The feasibility of low-temperature fabrication of transparent electrode elements from thin films of antimony-doped tin oxide (SnO2:Sb, ATO) has been investigated via inkjet printing, rf magnetron sputtering and post-deposition excimer laser processing. Laser processing of thin films on both glass and plastic substrates was performed using a Lambda Physik 305i excimer laser, with fluences in the range 20-100 mJ cm− 2 reducing sheet resistance from as-deposited values by up to 3 orders of magnitude. This is consistent with TEM analysis of the films that shows a densification of the upper 200 nm of laser-processed regions. |
| Keywords: | Transparent conducting oxide Inkjet printing Thin film Laser processing Excimer laser Displays Flexible substrates Conductivity |
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