Structural investigation of thin TiO2 films prepared by evaporation and post‐heating |
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Authors: | Martin Jerman Dieter Mergel |
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Affiliation: | Thin Film Technology Group, FB‐7 (Physics Department), Universität Duisburg‐Essen, Campus Essen, Germany |
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Abstract: | Thin films of TiO2 have been prepared by reactive evaporation of Ti2O3 at substrate temperatures from 150 °C to 350 °C and by post‐heating at 150 °C to 850 °C. The mass density of the films increases with increasing substrate and annealing temperature. The crystalline structure of the film prepared at 350 °C is anatase and becomes rutile upon annealing at 850 °C. All other films are amorphous as‐prepared and become anatase upon annealing above 250 °C. The crystallinity is higher for films prepared at lower temperature and does not increase with annealing temperature. Coatings with reproducible optical properties are obtained when deposited and post‐annealed at 250 °C. |
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Keywords: | Titanium oxide Evaporation Optical coatings Crystallization |
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