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Stress and strain in polycrystalline thin films |
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| Authors: | G.C.A.M. Janssen |
| Affiliation: | Department of Materials Science and Engineering, TU Delft, Mekelweg 2, 2628 CD Delft, the Netherlands |
| Abstract: | |
| Keywords: | Stress Strain Thin films Coatings Wafer curvature |
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