| 多层复合Bi/Sb纳米薄膜的制备及热电性能研究 |
| |
| 引用本文： | 代晶晶,王学生,疏敏,戚学贵. 多层复合Bi/Sb纳米薄膜的制备及热电性能研究[J]. 材料导报, 2012, 26(2): 98-100,111. DOI: 10.3969/j.issn.1005-023X.2012.02.024 |
| |
| 作者姓名： | 代晶晶 王学生 疏敏 戚学贵 |
| |
| 作者单位： | 1.华东理工大学机械与动力工程学院,上海,200237;2.华东理工大学机械与动力工程学院,上海,200237;3.华东理工大学机械与动力工程学院,上海,200237;4.华东理工大学机械与动力工程学院,上海,200237 |
| |
| 摘 要： | 选取单晶硅作为隔热衬底,Bi和Sb材料作为靶材,采用磁控溅射技术溅射制备多层复合纳米薄膜.研究了当固定调制周期为40nm,Bi和Sb的调制比分别为1∶1、3∶2、4:1和1∶4时,Bi/Sb超晶格复合薄膜的Seebeck系数、电导率和功率因子在160～250K温度范围内随温度的变化.发现当调制比为1∶4时,Bi/Sb薄膜的功率因子明显高于其它3种情况.
|
| 关 键 词： | 磁控溅射 纳米薄膜 Bi/Sb Seebeck系数 电导率 功率因子 |
Preparation and Research on Performance of Nano Multi-layer Bi/Sb Composite Thin Films |
| |
| DAI Jingjing , WANG Xuesheng , SHU Min , QI Xuegui. Preparation and Research on Performance of Nano Multi-layer Bi/Sb Composite Thin Films[J]. Materials Review, 2012, 26(2): 98-100,111. DOI: 10.3969/j.issn.1005-023X.2012.02.024 |
| |
| Authors: | DAI Jingjing WANG Xuesheng SHU Min QI Xuegui |
| |
| Affiliation: | (School of Mechanical and Power Engineering,East China University of Science and Technology,Shanghai 200237) |
| |
| Abstract: | The nano multi-layer composite material thin film,with single-crystal silicon as thermal insulation substrate and Bi and Sb as sputter targets respectively,was prepared by magnetron sputtering.At the same value of modulation periods(40nm),four different Bi/Sb modulation ratios: 1∶1,3∶2,4∶1,1∶4,were used.The Seebeck coefficient,electric conductivity and power factor of the superlattice composite thin films,composed of Bi and Sb,varied with the variation of temperature which ranged from 160K to 250K.It could be found that the power factor was significantly better with the modulation ratio 1∶4 than with the other modulation ratios. |
| |
| Keywords: | magnetron sputtering nano thin film Bi/Sb Seebeck coefficient electric conductivity power factor |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
