| 微弧氧化法及其在铁电薄膜制备中的应用 |
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| 引用本文： | 王敏,郭会勇,李文芳. 微弧氧化法及其在铁电薄膜制备中的应用[J]. 材料导报, 2012, 26(1): 40-42 |
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| 作者姓名： | 王敏 郭会勇 李文芳 |
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| 作者单位： | 1. 华南理工大学材料科学与工程学院,广州510640;广东技术师范学院机电学院,广州510665
2. 华南理工大学材料科学与工程学院,广州,510640 |
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| 基金项目： | 中国博士后科学基金特别资助项目 |
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| 摘 要： | 介绍了微弧氧化法的基本原理和工艺过程;综述了微弧氧化法制备铁电薄膜的发展历程及最新研究进展;讨论了目前微弧氧化制备铁电薄膜过程中存在的主要问题;提出了合理选择溶液体系和溶液浓度,研究工艺参数对薄膜表面形貌和铁电、介电性能的影响,提高薄膜表面质量是促进微弧氧化制备铁电薄膜技术发展的关键。
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| 关 键 词： | 微弧氧化 铁电薄膜 阳极氧化 |
Principle and Application to Ferroelectric Films of Micro-arc Oxidation |
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| WANG Min , GUO Huiyong , LI Wenfang. Principle and Application to Ferroelectric Films of Micro-arc Oxidation[J]. Materials Review, 2012, 26(1): 40-42 |
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| Authors: | WANG Min GUO Huiyong LI Wenfang |
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| Affiliation: | 1(1 School of Materials Science and Engineering,South China University,Guangzhou 510640;2 College of Mechanical Engineering,Guangdong Polytechnic Normal University,Guangzhou 510665) |
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| Abstract: | Principle and process of micro-arc oxidation are introduced;development history and the recent progress of ferroelectric films by micro-arc oxidation are reviewed.The main problems in preparing ferroelectric films by micro-arc oxidation are also discussed.Reasonably choosing solution system and concentration,considering the effects of parameters on surface morphology and ferroelectric,dielectric properties and improving the surface quality of films are presented,which are the key to the promotion of ferroelectric films by micro-arc oxidation. |
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| Keywords: | micro-arc oxidation ferroelectric film anodic oxidation |
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