| 超临界CO_2环境中沉积薄膜材料的研究进展 |
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| 引用本文： | 赵明涛,张艳飞,赵斌,杨俊和.超临界CO_2环境中沉积薄膜材料的研究进展[J].材料导报,2012,26(11):56-60. |
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| 作者姓名： | 赵明涛 张艳飞 赵斌 杨俊和 |
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| 作者单位： | 1. 上海理工大学能源与动力工程学院,上海,200093
2. 上海理工大学材料科学与工程学院,上海,200093 |
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| 基金项目： | 国家自然科学基金，浙江省钱江人才计划，宁波市自然科学基金 |
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| 摘 要： | 介绍了超临界流体沉积技术的基本原理及其沉积过程中的影响因素,综述了国内外关于超临界流体沉积技术制备金属、合金及氧化物薄膜材料的研究进展,并展望了今后的研究趋势。
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| 关 键 词： | 超临界流体 沉积 二氧化碳 薄膜 |
Recent Progress on Film Deposition in Supercritical CO2 |
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| ZHAO Mingtao
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ZHANG Yanfei
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ZHAO Bin
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YANG Junhe.Recent Progress on Film Deposition in Supercritical CO2[J].Materials Review,2012,26(11):56-60. |
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| Authors: | ZHAO Mingtao ZHANG Yanfei ZHAO Bin YANG Junhe |
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| Affiliation: | 1 School of Energy and Power Engineering,University of Shanghai for Science and Technology,Shanghai 200093; 2 School of Materials Science and Engineering,University of Shanghai for Science and Technology,Shanghai 200093) |
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| Abstract: | The principle of supercritical fluid deposition(SCFD) and the factors which influence the deposition process are introduced,research progress on preparation of metal,alloy and oxide films by SCFD technique is reviewed.And possible research directions in the future are also suggested. |
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| Keywords: | supercritical fluid deposition CO2 thin film |
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