| 溶胶-凝胶法制备Y掺杂ZnO薄膜及其光电性能研究 |
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| 引用本文： | 阳生红,张曰理,王旭升,汤健.溶胶-凝胶法制备Y掺杂ZnO薄膜及其光电性能研究[J].材料导报,2012,26(6):24-26,37. |
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| 作者姓名： | 阳生红 张曰理 王旭升 汤健 |
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| 作者单位： | 1. 中山大学物理科学与工程技术学院光电材料与技术国家重点实验室,广州,510275
2. 中山大学物理科学与工程技术学院光电材料与技术国家重点实验室,广州510275;山东大学晶体材料国家重点实验室,济南250100 |
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| 基金项目： | 国家自然科学基金(61176010;61172027);广东省自然科学基金(S2011010001397) |
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| 摘 要： | 采用溶胶-凝胶法在玻璃衬底上制备了不同掺Y浓度的ZnO透明导电薄膜。X射线衍射(XRD)表明,所制备的Y掺杂ZnO透明导电薄膜为六角纤锌矿结构的多晶薄膜,且具有C轴择优取向。随着Y掺杂浓度的升高,(002)峰向低角度方向移动。UV透射曲线表明,薄膜在可见光区(400～800nm)的平均透过率超过85%,具有明显的紫外吸收边,通过改变Y的掺入浓度,可以使吸收边向短波方向移动,从而使薄膜的禁带宽度可调。制备的Y掺杂ZnO薄膜电阻率最小值为3.68×102Ω·cm。
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| 关 键 词： | Y掺杂 ZnO透明导电薄膜 溶胶-凝胶法 |
Preparation of Y Doped ZnO Films by Sol-gel Method and Investigation of Their Optoelectrical Properties |
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| YANG Shenghong
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ZHANG Yueli
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WANG Xusheng
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TANG Jian.Preparation of Y Doped ZnO Films by Sol-gel Method and Investigation of Their Optoelectrical Properties[J].Materials Review,2012,26(6):24-26,37. |
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| Authors: | YANG Shenghong ZHANG Yueli WANG Xusheng TANG Jian |
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| Affiliation: | 1 (1 State Key Laboratory of Optoelectronic Materials and Technologies,School of Physics & Engineering,Sun Yat-sen University,Guangzhou 510275;2 State Key Laboratory of Crystal Material,Shandong University,Jinan 250100) |
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| Abstract: | The Y doped ZnO transparent conducting thin films were prepared on glass by sol-gel method.X-ray diffraction(XRD) showed that Y doped ZnO thin films had hexagonal wurtzite structure with a C-axis preferred orientation.The peak position of the(002) plane shifted to the low angle value with the increase of Y doping.From the transmittance spectrum,the average transmittance of Y doped ZnO film in the visible region(400～800nm) was beyond 85%,and the optical absorption edge obviously shifted to the shorter wavelength with increasing Y doping.So the film band gap energy can be adjusted by changing the Y doping concentration.The minimum resistivity of Y doped ZnO film is 3.68×102 Ω·cm. |
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| Keywords: | Y doping ZnO transparent conducting film sol-gel method |
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