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GaN基HEMT电流崩塌现象相关的表面陷阱效应
引用本文:罗谦,杜江锋,卢盛辉,周伟,夏建新,于奇,杨谟华. GaN基HEMT电流崩塌现象相关的表面陷阱效应[J]. 固体电子学研究与进展, 2008, 28(1): 24-28
作者姓名:罗谦  杜江锋  卢盛辉  周伟  夏建新  于奇  杨谟华
作者单位:电子科技大学微电子学与固体电子学学院,成都,610054
摘    要:采用脉冲测试方法研究了与GaN基HEMT电流崩塌相关的表面陷阱效应。对特制的无台面器件进行的实验证实了表面陷阱之间存在输运过程。数据表明,当栅应力持续时间足够长时,被充电的表面陷阱会达到某种稳态。该稳态是包含了陷阱俘获与释放过程的动态平衡态。

关 键 词:氮化镓  表面态  电流崩塌
文章编号:1000-3819(2008)01-024-05
修稿时间:2006-06-21

A Study on the Surface Trapping Process Related to the Current Collapse in the GaN Based HEMT by a New Measurement Method
LUO Qian,DU Jiangfeng,LU Shenghui,ZHOU Wei,XIA Jianxin,YU Qi,YANG Mohua. A Study on the Surface Trapping Process Related to the Current Collapse in the GaN Based HEMT by a New Measurement Method[J]. Research & Progress of Solid State Electronics, 2008, 28(1): 24-28
Authors:LUO Qian  DU Jiangfeng  LU Shenghui  ZHOU Wei  XIA Jianxin  YU Qi  YANG Mohua
Affiliation:LUO Qian DU Jiangfeng LU Shenghui ZHOU Wei XIA Jianxin YU Qi YANG Mohua(School of Microelectronics , Solid-state Electronics,University of Electronics Science , Technology of China,Chengdu,610054,CHN)
Abstract:The surface traping process related to current collapes in GaN based HEMT is investigated by a new measurement method.A special AlGaN/GaN HEMT without mesa fabrication is designed for this study.the experimental results confirm the existence of the surface transport process.The data analysis indicates that there is a dynamic equilibrium of the chraged surface while the stress is applied for enough time.
Keywords:GaN  surface state  current collapse  
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