微结构谐振梁式压力传感器研究

利用微电子机械加工技术成功地研制出电势激励、压阻拾振的高精度硅谐振梁式压力传感器，传感器的谐振器的品质因素Ｑ值大于１７０００。采用扫描检测方式和闭环自激振荡方式测定压力传感器的压力特性，其压力测试范围为０￣４００ｋＰａ，线性相关系数为０．９９９９５，测试精度小于０。０６％Ｆ．Ｓ。

Study of Microstructure Silicon Resonant Beam Pressure Sensors

A high accuracy pressure sensor with a micro-machined single crystal beam reson ator has been successfully fabricated by utilizing micro-electromechanical sys t em (MEMS) technology. The silicon beam is electro-thermally excited into vibrat ion and the resulting mechanical vibration of the beam is detected by a piezo re sistor receptor. The quality factor Q value of this silicon beam resonator i s gr eated than 17 000 in vacuum. The silicon resonant beam pressure sensor has been characterized with an open-loop frequency sweeping method and a close-loop sel f-oscillating method. The sensor shows a good linearity of frequency versus pre ssure in the range from 0 to 400 kPa, and a high accuracy of 0.06% F.S.