| PLD生长Fe_3O_4薄膜的微结构及磁性能研究 |
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| 引用本文： | 曹林洪,吴卫东,唐永建,葛芳芳,白黎.PLD生长Fe_3O_4薄膜的微结构及磁性能研究[J].电子元件与材料,2009,28(4). |
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| 作者姓名： | 曹林洪 吴卫东 唐永建 葛芳芳 白黎 |
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| 作者单位： | 1. 中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900;西南科技大学,材料科学与工程学院,四川,绵阳,621010
2. 中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900 |
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| 基金项目： | 等离子体物理国防科技重点实验室基金，国家重点基础研究发展规划(973计划) |
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| 摘 要： | 以烧结α-Fe2O3为靶材,采用脉冲激光沉积(PLD)方法,在Si(100)基片上制备了Fe3O4薄膜。XRD分析表明,所得薄膜为立方尖晶石结构的Fe3O4,而且具有(311)和(440)择优取向;显微激光喇曼(Raman)光谱分析进一步证实薄膜中只出现单相Fe3O4;AFM分析表明,所得Fe3O4薄膜表面平整;采用VSM分析表明,Fe3O4薄膜的饱和磁化强度Ms约为170kA·m–1,而其矫顽力约为412kA·m–1。
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| 关 键 词： | 无机非金属材料 Fe3O4薄膜 脉冲激光沉积 喇曼光谱 磁性能 |
Study on microstructure and magnetic properties of Fe_3O_4 thin films grown by pulsed laser deposition |
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| CAO Linhong,WU Weidong,TANG Yongjian,GE Fangfang,BAI Li.Study on microstructure and magnetic properties of Fe_3O_4 thin films grown by pulsed laser deposition[J].Electronic Components & Materials,2009,28(4). |
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| Authors: | CAO Linhong WU Weidong TANG Yongjian GE Fangfang BAI Li |
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| Affiliation: | 1. Research Center of Laser Fusion;China Academy of Engineering Physics;Mianyang 621900;Sichuan Province;China;2. School of Materials Science and Engineering;Southwest University of Science and Technology;Mianyang 621010;China |
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| Abstract: | Using sintered α-Fe2O3 as target, Fe3O4 thin films were grown on Si(100) substrates by pulsed laser deposition (PLD) method. The cubic spinel structure of Fe3O4 thin films with preferential (311) and (440) orientation was analyzed by XRD. The presence of single-phase Fe3O4 in the films was confirmed by Raman spectrum. AFM analysis shows that the surface of the films is flat. The room-temperature ferromagnetism of the films is observed by hysteresis loops using VSM. The saturation magnetization (Ms) is close to 170 kA·m-1 and the coercivity is about 412 kA·m–1. |
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| Keywords: | non-metallic inorganic material Fe3O4 thin film pulsed laser deposition Raman spectrum magnetic properties |
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