Electromechanical characterization of a new micro programmable blazed grating by laser Doppler vibrometry |
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Authors: | Yi-Ting Yu Wei-Zheng Yuan Da-Yong Qiao |
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Affiliation: | (1) Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, 710072 Xi’an, People’s Republic of China |
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Abstract: | The prototype of a new micro programmable blazed grating driven electrostatically was fabricated using a two-layer polysilicon
surface micromachining process. And initially, to characterize its electromechanical performances, such as the driving voltage
versus displacement relationship, frequency response and step response, the laser Doppler vibrometry was employed. The measured
results reveal the pull-in voltage of 110–115 V, resonant frequency of 78 KHz, quality factor of 2.89, adjusting time of 12 μs,
and damping ratio of ~0.68 for the achieved grating sample. As a result, the grating functions well electromechanically. As
for its optical performances, a number of optical experiments are in progress. |
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Keywords: | |
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