集成化MEMS工艺设计技术的研究

针对目前MEMS研究领域中普遍存在的器件设计与加工工艺脱节的问题，提出了一种集成化的MEMS工艺设计技术。即在器件设计的过程中充分考虑加工工艺的特点和制约，提高器件的工艺设计能力和效率．这种工艺设计方法以结构材料、反应材料、工艺设备和环境限制的数据库为基础，从工艺过程为结构材料和反应物之间的物理或化学反应的角度出发，提炼出了工艺设计规则；在设计过程中，结合版图尺寸和具体的工艺参数，对工艺过程中器件结构二维断面上的所有结构材料的状态和图形进行计算和记录，并以此信息为依据结合设计规则判断工艺流程的合理性，并把相应的工艺信息、材料信息等代入器件的结构分析中去，实现MEMS器件的集成化工艺和结构设计．最后三维可视化设计工具IMEE1．0实现了集成化的设计技术，并通过对一个结构比较复杂的气体传感器进行设计和制作。验证了这种集成化工艺设计技术的可行性和实用性．

Research on Computer Aided MEMS Process Integration Technology

According to the bottle-neck problem of MEMS that serious mismatch of fabrication technology and design tools, a novel computer aided MEMS process integration technology was put forward in this paper,which considers characteristics of fabrication and its limitations to enhance the effective and ability of process design during design of MEMS devices.This design technology was based on the database of structure materials, process materials and limitations which come from equipments or environments,and driven by that process can be expressed by physical or chemical reaction among structure materials and reactive solutions/gas/ions...,to extract process design rules.During the design strategy,the 2-D data of device'profile according to each step was calculated out by layout data and process parameters,these information is applied to check out error or mismatch among the process flows,and meanwhile these data can be transferred to following analysis, hence the whole program can realize the integrated design of both device'process and structure.In the end,a 3D visua- liozation tool IMEE1.0,which acts as a verification of this design technology was also developed.An example of a surface process gas sensor was investigated, which realized this integrated process design technology.