MEMS仿生矢量水听器封装结构的隔振研究

利用隔振原理，设计了矢量水声传感器系统中一种新型隔振封装结构模型，即加入橡胶减振器的新型封装结构。采用ANSYS软件对封装模型进行模态分析，研究模型结构和几何尺寸对其隔振性能的影响，确定最优隔振封装结构；对模型的几何尺寸及橡胶隔震材料力学参数进行优化，并对优化模型的隔振性能进行实验测试和评估。实验结果表明：所设计的新型橡胶减振结构具有一定的减振效果，隔离了一定程度的核心器件以外的外界振动干扰，提高了原有封装结构矢量水听器的探测灵敏度。再次验证了硅微MEMS仿生矢量水声传感器不但体积小、质量轻、结构简单，而且具有低频灵敏度高等优点。

Research of MEMS Bionic Vector Hydrophone Vibration Control

One kind of anti-shock packaging model for the bionic vector acoustic hydrophone in the acoustic sensor system have been built by using of anti-shock principle.Designed a new package model, which adds a new rubber damper package.The modal analyses have been made to study on the structure and dimension effects on the anti-shock performance of the model so as to select the optimum packaging structure,and the optimum packaging model with the lowest natural frequencies has been gained by optimizing the dimension of the model and material parameters of the rubber by using ANSYS.In the end, the anti-shock performance of the optimum model has been tested and evaluated.Experimental results show that designed rubber damping structure has a certain damping effect and Isolated a certain level of external vibration disturbances outside the core device.Moreover,it improved the detection sensitivity of original packaging structure vector hydrophone.Verified MEMS silicon micro-bionic underwater acoustic vector sensor is not only small size,light weight,simple structure,and has a low frequency and high sensitivity.