| 表面活性剂在P型锗片磨削工艺中的应用 |
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| 引用本文： | 陆峰,杨洪星,刘春香,赵权. 表面活性剂在P型锗片磨削工艺中的应用[J]. 电子工业专用设备, 2010, 39(1): 28-30 |
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| 作者姓名： | 陆峰 杨洪星 刘春香 赵权 |
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| 作者单位： | 中国电子科技集团公司第四十六研究所,天津,300220;中国电子科技集团公司第四十六研究所,天津,300220;中国电子科技集团公司第四十六研究所,天津,300220;中国电子科技集团公司第四十六研究所,天津,300220 |
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| 摘 要： | 由于锗材料具有优良的抗辐射性能,在航天领域获得了新的应用。在锗单晶片的磨削过程中,砂轮磨损产生的颗粒以及磨削下来的锗屑容易将砂轮阻塞,从而对锗单晶片表面的磨削纹路产生影响。通过试验,在去离子水管路上增加一条表面活性剂管路,可有效减少砂轮阻塞现象,降低砂轮修整的频率,提高了锗磨削片的表面质量。
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| 关 键 词： | 表面活性剂 锗 表面磨削 |
Application of Surfactant in Grinding Process of P Germanium Crystalline Wafers |
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| LU Feng,YANG Hongxing,LIU Chunxiang,ZHAO Quan. Application of Surfactant in Grinding Process of P Germanium Crystalline Wafers[J]. Equipment for Electronic Products Marufacturing, 2010, 39(1): 28-30 |
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| Authors: | LU Feng YANG Hongxing LIU Chunxiang ZHAO Quan |
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| Affiliation: | The 46th Research Institute;CETC;Tianjin 300220;China |
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| Abstract: | Germanium had excellent resist radiation performance,so it was widely used in aerospace fields.In surface grinding process of germanium wafers,the loss of the grinding wheel would jam the surface of the grinding wheel and affect the surface grinding texture of the wafers.In the article,we added one pipe which used to flow the surfactant,and this method could greatly reduce the jammed phenomenon of the grinding wheel.It was greatly improved that the surface quality of the wafers. |
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| Keywords: | Surfactant Germanium Surface grinding |
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