Synthesis of Si3N4 with Emphasis on Si-S-N Chemistry

Industrial production of Si₃N₄ from SiCI₄, is increasing. An element rivaling CI in abundance and cheapness with potentially suitable chemistry for this application is sulfur. Thus, Si–S–N chemistry was investigated to determine its usefulness in producing Si₃N₄. Bifunctionality in S, as opposed to mono-functionality in CI, may allow special routes via polymers to become important.