|
|||||
|
|
Chemical vapour deposition of silicon carbide by pyrolysis of methylchlorosilanes |
|
| Authors: | Byung Jin Choi Dong Won Park Dai Ryong Kim |
| Affiliation: | (1) Department of Welding Engineering, Taegu Junior Health College, Taejeundong san 7, Pookgu, Taegu, 702-260, Korea;(2) Department of Metallurgical Engineering, Kyungpook National University, Sankyukdong 1370, Pookgu, Taegu, 702-701, Korea |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |